Cluster Tool Support

Fastmatics supports supervisory control of multi-module systems.

• Wafer scheduling
• Maintenance mode operation of each module while the others can run recipes
• Selective data sharing among multiple modules is set up through drop down menu settings
• Interlocks across multiple chambers is supported and does not require elaborate programming
• Error recovery can be programmed using the built in scripting language
• Cluster tool support is provided under contract only for R&D systems, please see Applications for uses of Fastmatics on cluster tools