PID Control

Fastmatics contains a few types of control loops including a traditional Proportional Integral Differential (PID) loop and a bang-bang control loop for low power stepper motor actuation.

PID loops in Fastmatics are intended for control scenarios with time constants longer than a few seconds. Heater PID control is generally OK within Fastmatics and a number of heaters (substrate heaters, heater blanket control) have been controlled in systems directly from Fastmatics with a high degree of integration with recipe and HMI functions.